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Proceedings of the Symposium on Microstructures and Microfabricated Systems IV

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Bibliographic Details
Corporate Authors: Symposium on Microstructures and Microfabricated Systems (4th 1998 Boston, Massachusetts); Electrochemical Society. Meeting 1998 Boston, Massachusetts) (Boston, Massachusetts))
Group Author: (Peter J.); Bailey Wayne E.; Hughes Henry G.; Hesketh P. J.
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c1998.
Literature type: Book
Language: English
Series: Proceedings ; 98-14
Subjects:
Micromechanics.
Microélectronique.
Microstructure (physique).
Micromécanique (Ingénierie).
Capteurs (Technologie).
Equipement électronique miniaturisé.
Microelectronics
Microstructure
Carrier Form: viii, 270 p.: ill. ; 24 cm.
ISBN: 1566772060
Index Number: TB4
CLC: TB4-532
Call Number: TB4-532/S989/1998
Contents: Symposium held during the 194th Meeting of the Electrochemical Society, November 1-16th, 1998, Boston, Massachusetts.
Includes bibliographical references and index.

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