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Advances in metrology for x-ray and EUV optics：2-3 August, 2005, San Diego, California, USA

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Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Takacs Peter Z.; Taylor J. S.; (John S.); Assoufid Lahsen.
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2005.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 5921
Subjects:
Optical instruments > Design and construction.
Measuring instruments > Design and construction.
Laser interferometers.
Mensuration
Optical measurements
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 0819459267
Index Number: TB96
CLC: TB96-532
O439-532
Call Number: TB96-532/A244-1/2005
Contents: Includes bibliographical references and author index.

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