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Atomic layer deposition of nanostructured materials

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Bibliographic Details
Group Author: Pinna Nicola; Knez Mato
Published: Wiley-VCH John Wiley [distributor],
Publisher Address: Weinheim Chichester
Publication Dates: 2012.
Literature type: Book
Language: English
Subjects:
Chemical vapor deposition
Nanostructured materials
Atomlagenabscheidung
Nanostrukturiertes Material
Carrier Form: xxxvi, 435 p.: ill, ; 24 cm.
ISBN: 9783527327973 (hbk.)
3527327975 (hbk.)
Index Number: TB383
CLC: TB383
Call Number: TB383/A881-1
Contents: Includes bibliographical references and index.

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