Cover is for reference only

Metrology, inspection, and process control for microlithography XXXIV : 24-27 February 2020, San Jose, California, United States /

Saved in:
Bibliographic Details
Corporate Authors: Metrology, Inspection, and Process Control for Microlithography Conference San Jose, California, United States; SPIE Society
Group Author: Adan, Ofer; Robinson, John C
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2020]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 11325
Subjects:
Integrated circuits > Measurement > Congresses
Integrated circuits > Inspection > Congresses
Microlithography > Congresses
Process control > Congresses
Item Description: "At SPIE advanced lithography"--Cover.
Carrier Form: 1 volume (various pagings) : illustrations, forms ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510634176 (paperback) :
CLC: TN405.7-532
Call Number: TN405.7-532/M594/2020

Related Book Recommendations