Introduction to focused ion beam nanometrology /
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Main Authors: | |
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Corporate Authors: | ; |
Published: |
Morgan & Claypool Publishers,
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Publisher Address: |
San Rafael, CA : Bristol, UK : |
Publication Dates: |
[2015] [2015] |
Literature type: | Book |
Language: | English |
Series: |
IOP concise physics,
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Subjects: | |
Item Description: |
"Version: 20151001"--Title page verso. "A Morgan & Claypool publication as part of IOP Concise Physics"--Title page verso. |
Carrier Form: | 1 volume (various pagings) : illustrations (some color) ; 24 cm. |
Bibliography: | Includes bibliographical references. |
ISBN: | 9781681740201 |
Index Number: | QC176 |
CLC: | TB383 |
Call Number: | TB383/C877 |