Introduction to focused ion beam nanometrology /

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Bibliographic Details
Main Authors: Cox, David C. David Christopher, 1965
Corporate Authors: Morgan & Claypool Publishers; Institute of Physics Great Britain
Published: Morgan & Claypool Publishers,
Publisher Address: San Rafael, CA :
Bristol, UK :
Publication Dates: [2015]
[2015]
Literature type: Book
Language: English
Series: IOP concise physics,
Subjects:
Item Description: "Version: 20151001"--Title page verso.
"A Morgan & Claypool publication as part of IOP Concise Physics"--Title page verso.
Carrier Form: 1 volume (various pagings) : illustrations (some color) ; 24 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781681740201
Index Number: QC176
CLC: TB383
Call Number: TB383/C877