Screen LibrarySemiconductor process and device performance modeling：symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.
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| Group Author: | ; ; ; |
|---|---|
| Published: |
Materials Research Society,
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| Publisher Address: | Warrendale, Pa. |
| Publication Dates: | c1998. |
| Literature type: | Book |
| Language: | English |
| Series: |
Materials Research Society symposium proceedings, ; v. 490 |
| Subjects: | |
| Carrier Form: | ix, 273 p.: ill. ; 24 cm. |
| ISBN: | 1558993959 |
| Index Number: | TN304 |
| CLC: |
TN304.205-532 TN305-532 TN304.105-532 |
| Call Number: | TN304.105-532/S471/1997/ |
| Contents: | Includes bibliographical references and indexes. |