Hydrogenated amorphous silicon alloy deposition processes
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Main Authors: | |
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Group Author: | |
Published: |
M. Dekker,
|
Publisher Address: | New York |
Publication Dates: | c1993. |
Literature type: | Book |
Language: | English |
Series: |
Applied physics ; 1 |
Subjects: | |
Carrier Form: | xiv, 327 p.: ill. ; 24 cm. |
ISBN: | 0824791460 (acid-free paper) |
Index Number: | TN304 |
CLC: | TN304.105.5 |
Call Number: | TN304.105.5/L949/ |
Contents: | Includes bibliographical references (p. 243-316) and index. |