Hydrogenated amorphous silicon alloy deposition processes

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Bibliographic Details
Main Authors: Luft Werner
Group Author: Tsuo Y. Simon
Published: M. Dekker,
Publisher Address: New York
Publication Dates: c1993.
Literature type: Book
Language: English
Series: Applied physics ; 1
Subjects:
Carrier Form: xiv, 327 p.: ill. ; 24 cm.
ISBN: 0824791460 (acid-free paper)
Index Number: TN304
CLC: TN304.105.5
Call Number: TN304.105.5/L949/
Contents: Includes bibliographical references (p. 243-316) and index.