Screen LibraryLaser microfabrication : thin film processes and lithography /
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, ther...
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| Corporate Authors: | |
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| Group Author: | ; |
| Published: |
Academic Press,
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| Publisher Address: | Boston : |
| Publication Dates: | 1989. |
| Literature type: | eBook |
| Language: | English |
| Subjects: | |
| Online Access: |
http://www.sciencedirect.com/science/book/9780122334306 |
| Summary: |
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher. |
| Carrier Form: | 1 online resource (xii, 587 pages) : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: |
9780080918020 0080918026 |
| Index Number: | TA1677 |
| CLC: | TN249 |
| Contents: | Sources, optics, and laser microfabrications systems for direct writing and projection lithography / Y.S. Liu -- Laser-stimulated molecular processes on surfaces / T.J. Chuang -- Spectroscopy and photochemistry of gases, adsorbates, and liquids / M. Rothschild -- Photophysics and thermophysics of light absorption and energy transport in solids / C.I.H. Ashby and J.Y. Tsao -- Transport and kinetics / H.J. Zeigler, D.J. Ehrlich, and J.Y. Tsao -- Laser etching / John J. Ritsko -- Laser deposition : energetics and chemical kinetics / R.L. Jackson [and others] -- Laser deposition : experimental approaches / J. Haigh and M.R. Aylett -- Epitaxy / S.J.C. Irvine -- Doping and oxidation / Ian W. Boyd. |