Plasma deposition, treatment, and etching of polymers
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Group Author: | |
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Published: |
Academic Press,
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Publisher Address: | Boston |
Publication Dates: | c1990. |
Literature type: | Book |
Language: | English |
Series: |
Plasma--materials interactions |
Subjects: | |
Carrier Form: | xiii, 528 p.: ill. ; 24 cm. |
ISBN: | 0122004302 |
Index Number: | TQ31 |
CLC: | TQ31 |
Call Number: | TQ31/P715/ |