International Conference on Micro- and Nano-Electronics, 2009:5-9 October 2009, Zvenigorod, Russian Federation
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Corporate Authors: | ; ; ; |
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Group Author: | ; ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c2010. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; v. 7521 |
Subjects: | |
Carrier Form: | 1 v. (various pagings): ill. ; 27 cm. |
ISBN: |
9780819479112 081947911X |
Index Number: | TN4 |
CLC: | TN4-532 |
Call Number: | TN4-532/M626-4/2009 |
Contents: | Includes bibliographical references. |