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International Conference on Micro- and Nano-Electronics, 2009：5-9 October 2009, Zvenigorod, Russian Federation

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Bibliographic Details
Corporate Authors: International Conference on Micro- and Nano-Electronics (2009 Zvenigorod, Russia); Rossiĭskai︠a︡ akademii︠a︡ nauk.; SPIE (Society); Fiziko-tekhnologicheskiĭ institut (Rossiĭskai︠a︡ akademii︠a︡ nauk)
Group Author: (Aleksandr Aleksandrovich); Valiev Kamilʹ Akhmetovich.; Orlikovskiĭ A. A.
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2010.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 7521
Subjects:
Nanoelectronics.
Microelectronics
Carrier Form: 1 v. (various pagings): ill. ; 27 cm.
ISBN: 9780819479112
081947911X
Index Number: TN4
CLC: TN4-532
Call Number: TN4-532/M626-4/2009
Contents: Includes bibliographical references.

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