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Process and equipment control in microelectronic manufacturing：19-20 May 1999, Edinburgh, Scotland

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Bibliographic Details
Corporate Authors: European Commission. Directorate-General XII, Science, Research and Development; Scottish Enterprise; Sira Technology Centre U.K; Institution of Electrical Engineers; Society of Photo-Optical Instrumentation Engineers
Group Author: Narasimhan Murali K; European Optical Society; Yallup Kevin
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c1999.
Literature type: Book
Language: English
Series: Proceedings EUROPT series ; v. 3742
Subjects:
Integrated circuits > Very large scale integration > Congresses
Microelectronics > Materials
Carrier Form: vii, 206 p.: ill. ; 28 cm.
ISBN: 0819432229
Index Number: TN405
CLC: TN405-532
Call Number: TN405-532/P963.1/1999/
Contents: Includes bibliographic references and author index.

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