Process and equipment control in microelectronic manufacturing:19-20 May 1999, Edinburgh, Scotland
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Corporate Authors: | ; ; ; ; |
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Group Author: | ; ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c1999. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings EUROPT series ; v. 3742 |
Subjects: | |
Carrier Form: | vii, 206 p.: ill. ; 28 cm. |
ISBN: | 0819432229 |
Index Number: | TN405 |
CLC: | TN405-532 |
Call Number: | TN405-532/P963.1/1999/ |
Contents: | Includes bibliographic references and author index. |