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CLC: O - 数理科学和化学

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Modeling aspects in optical metrology：18-19 June 2007, Munich, Germany

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Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Bodermann Bernd; Silver Richard M; Bosse Harald
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2007.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 6617
Subjects:
Integrated circuits
Semiconductors > Design and construction
Optical measurements
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 9780819467591
0819467596
Index Number: O432
CLC: O432.2-532
TN4-532
Call Number: O432.2-532/M689/2007
Contents: Includes bibliographical references and author index.

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