Modeling aspects in optical metrology:18-19 June 2007, Munich, Germany
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Corporate Authors: | |
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Group Author: | ; ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c2007. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; v. 6617 |
Subjects: | |
Carrier Form: | 1 v. (various pagings): ill. ; 28 cm. |
ISBN: |
9780819467591 0819467596 |
Index Number: | O432 |
CLC: |
O432.2-532 TN4-532 |
Call Number: | O432.2-532/M689/2007 |
Contents: | Includes bibliographical references and author index. |