Advances in metrology for X-ray and EUV optics VII : 6-7 August 2017, San Diego, California, United States /

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Bibliographic Details
Corporate Authors: SPIE Society
Group Author: Assoufid, Lahsen; Ohashi, Haruhiko; Asundi, Anand
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2017]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 10385
Subjects:
Item Description: "SPIE optics + photonics" -- Cover.
Carrier Form: 1 volume (various pagings) : illustrations (some color) ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510612273 (paperback) :
CLC: O439-532
TB96-532
Call Number: TB96-532/A244-1/2017