Advances in metrology for X-ray and EUV optics VII : 6-7 August 2017, San Diego, California, United States /
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Corporate Authors: | |
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Group Author: | ; ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Washington : |
Publication Dates: | [2017] |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE,
volume 10385 |
Subjects: | |
Item Description: | "SPIE optics + photonics" -- Cover. |
Carrier Form: | 1 volume (various pagings) : illustrations (some color) ; 28 cm. |
Bibliography: | Includes bibliographical references. |
ISBN: | 9781510612273 (paperback) : |
CLC: |
O439-532 TB96-532 |
Call Number: | TB96-532/A244-1/2017 |