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Ceramic thick films for MEMS and microdevices

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Bibliographic Details
Main Authors: Dorey Robert A
Published: William Andrew Elsevier Science [distributor],
Publisher Address: Amsterdam Boston, MA Oxford
Publication Dates: 2012.
Literature type: Book
Language: English
Series: Micro & nano technologies series
Subjects:
Microelectromechanical systems > Design and construction
Nanoelectronics
Thick-film circuits > Design and construction
Carrier Form: xviii, 191 p.: ill. ; 24 cm.
ISBN: 9781437778175 (hbk.)
1437778178 (hbk.)
Index Number: TN451
CLC: TN451
Call Number: TN451/D695
Contents: Includes bibliographical references (p. 183-185) and index.

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