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Integrated chemical microsensor systems in CMOS technology

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Bibliographic Details
Main Authors: Hierlemann A (Andreas)
Published: Springer,
Publisher Address: Berlin
Publication Dates: c2005.
Literature type: Book
Language: English
Series: Microtechnology and MEMS
Subjects:
Metal oxide semiconductors, Complementary
Chemical detectors
Carrier Form: ix, 229 p.: ill. ; 24 cm.
ISBN: 3540237828 (hd.bd.)
Index Number: TN432
CLC: TN432
Call Number: TN432/H633
Contents: Includes bibliographical references ( [p.193]-217) and index.

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