Screen LibraryHandbook of photomask manufacturing technology
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| Group Author: | |
|---|---|
| Published: |
Taylor & Francis,
|
| Publisher Address: | Boca Raton [Fla.] |
| Publication Dates: | 2005. |
| Literature type: | Book |
| Language: | English |
| Subjects: | |
| Carrier Form: | xxiii, 704 p.: ill. ; 26 cm. |
| ISBN: | 0824753747 (alk. paper) |
| Index Number: | TN05 |
| CLC: |
TN05-62 TN305.7-62 TN405.7-62 |
| Call Number: | TN05-62/H236-1 |
| Contents: | Includes bibliographical references and index. |