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Laser-based micro- and nanoprocessing XII : 30 January-1 February 2018, San Francisco, California, United States /

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Bibliographic Details
Corporate Authors: Laser-Based Micro- and Nanoprocessing Conference San Francisco, California, United States; SPIE Society
Group Author: Klotzbach, Udo; Washio, Kunihiko; Kling, Rainer
Published: SPIE,
Publisher Address: Bellingham, Washington, USA :
Publication Dates: [2018]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 10520
Subjects:
Electronic packaging > Congresses
Lasers > Industrial applications > Congresses
Micromachining > Congresses
Micromechanics > Congresses
Item Description: "SPIE. Photonics West" --cover.
Carrier Form: 1 volume (various pagings) : illustrations, forms ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510615250 (paperback) :
1510615253 (paperback)
CLC: TN249-532
Call Number: TN249-532/L343-8/2018

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