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Proceedings of the Fifth International Symposium on High Purity Silicon

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Bibliographic Details
Corporate Authors: International Symposium on High Purity Silicon (5th 1998 Boston, Mass; Electrochemical Society. Electronics Division
Group Author: Claeys C. L
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c1998.
Literature type: Book
Language: English
Series: Proceedings ; 98-13
Subjects:
Crystal growth
Semiconductor wafers
Silicon crystals
Carrier Form: xi, 478 p.: ill. ; 23 cm.
ISBN: 1566772079
Index Number: TN304
CLC: TN304.1-532
Call Number: TN304.1-532/I617/1998
Contents: "Electronics Division."
Includes bibliographical references and indexes.

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