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Microsystems engineering：metrology and inspection III : 23-25 June, 2003, Munich, Germany

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Bibliographic Details
Corporate Authors: Wissenschaftliche Gesellschaft Lasertechnik; Society of Photo-Optical Instrumentation Engineers; European Optical Society
Group Author: Gorecki Christophe
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2003.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 5145
Subjects:
Optical detectors > Industrial applications
Microelectronics
Microelectromechanical systems
Interferometry
Mensuration
Quality control > Optical methods
Carrier Form: ix, 210 p.: ill. ; 28 cm.
ISBN: 0819450154
Index Number: TB4
CLC: TB4-532
Call Number: TB4-532/M626-1/2003
Contents: Includes bibliographical references and author index.

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