Microsystems engineering:metrology and inspection III : 23-25 June, 2003, Munich, Germany
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Corporate Authors: | ; ; |
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Group Author: | |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c2003. |
Literature type: | Book |
Language: | English |
Series: |
SPIE proceedings series ; v. 5145 |
Subjects: | |
Carrier Form: | ix, 210 p.: ill. ; 28 cm. |
ISBN: | 0819450154 |
Index Number: | TB4 |
CLC: | TB4-532 |
Call Number: | TB4-532/M626-1/2003 |
Contents: | Includes bibliographical references and author index. |