Radio frequency power in plasmas:proceedings of the 19th topical conference, Newport, Rhode Island, USA, 1-3 June 2011
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Corporate Authors: | |
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Group Author: | ; ; ; |
Published: |
American Institute of Physics,
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Publisher Address: | Melville, N.Y. |
Publication Dates: | 2011. |
Literature type: | Book |
Language: | English |
Series: |
AIP conference proceedings ; 1406 |
Subjects: | |
Carrier Form: | xi, 552 p.: ill. (some col.) ; 25 cm. |
ISBN: |
9780735409781 0735409781 9780735409781 (hbk.) |
Index Number: | O53 |
CLC: | O53-532/R129 |
Call Number: | O53-532/R129/2011 |
Contents: | Includes bibliographical references and index. |