Input/output and imaging technologies:9-11 July 1998, Taipei, Taiwan

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Bibliographic Details
Corporate Authors: Semiconductor Equipment and Materials International Taiwan; Society of Photo-Optical Instrumentation Engineers
Group Author: Kung Teh-Ming; Larsen Jan; Tsai Yusheng Tim
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c1998.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 3422
Subjects:
Carrier Form: ix, 310 p.: ill. ; 28 cm.
ISBN: 0819428760
Index Number: TP303
CLC: TP303-532
TP334-532
TP391.4-532
Call Number: TP334-532/I58/1998/
Contents: Includes bibliographical references and index.