Laser precision microfabrication

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Bibliographic Details
Corporate Authors: SpringerLink (Online service)
Group Author: Meunier Michel. 1956-; Piqué Alberto.; Sugioka Kōji.
Published: Springer-Verlag,
Publisher Address: Heidelberg New York
Publication Dates: c2010.
Literature type: Book
Language: English
Series: Springer series in materials science ; 135
Subjects:
Online Access: http://dx.doi.org/10.1007/978-3-642-10523-4
Carrier Form: 1 online resource (xvi, 344 p.): ill. (some col.)
ISBN: 9783642105234 (electronic bk.)
3642105238 (electronic bk.)
Index Number: TN249
CLC: TN249
Contents: Includes bibliographical references and index.