Wafer level 3-D ICs process technology

Saved in:
Bibliographic Details
Corporate Authors: SpringerLink (Online service)
Group Author: Gutmann Ronald J.; Reif L. Rafael.; Tan Chuan Seng.
Published: Springer,
Publisher Address: New York London
Publication Dates: 2008.
Literature type: Book
Language: English
Series: Series on integrated circuits and systems
Subjects:
Online Access: http://dx.doi.org/10.1007/978-0-387-76534-1
Carrier Form: 1 online resource (xiv, 358 p.): ill.
ISBN: 9780387765341 (electronic bk.)
0387765344 (electronic bk.)
Index Number: TN492
CLC: TN492
Contents: Includes bibliographical references and index.