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Materials and device characterization in micromachining III：18-19 September 2000, Santa Clara, USA

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Bibliographic Details
Corporate Authors: Semiconductor Equipment and Materials International; Solid State Technology Organization; Sandia National Laboratories; Society of Photo-Optical Instrumentation Engineers
Group Author: Coane Philip J; Vladimirsky Yuli
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2000.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4175
Subjects:
Electromechanical devices
Micromechanics
Micromachining
Carrier Form: ix, 200 p.: ill. ; 28 cm.
ISBN: 0819438316
Index Number: TH11
CLC: TH11-532
TP2-532
Call Number: TH11-532/M425/2000
Contents: Includes bibliographical references and index.

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