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Gettering and Defect Engineering in Semiconductor Technology：GADEST '97 : proceedings of the 7th International Autumn Meeting, Spa, Belgium, October 5-10, 1997

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Bibliographic Details
Corporate Authors: International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" 1997 Spa, Belgium) (Spa, Belgium))
Group Author: Claeys Cor L
Published: Scitec Pub. Ltd.,
Publisher Address: Zurich
Publication Dates: c1997.
Literature type: Book
Language: English
Series: Solid state phenomena ; v. 57/58
Subjects:
Silicon crystals > Defects > Congresses
Electric engineering > Materials > Congresses
Semiconductors > Congresses
Getters > Congresses
Carrier Form: xv, 538 p.: ill. ; 25 cm.
ISBN: 3908450276
Index Number: TN3
CLC: TN3-532
Call Number: TN3-532/G394/1997/
Contents: Includes bibliographical references and index.

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