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MOEMS and miniaturized systems IV：27-28 January, 2004, San Jose, California, USA

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Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: El-Fatatry Ayman
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2004.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 5346
Subjects:
Miniature electronic equipment
Micromechanics
Optics, Adaptive
Optical scanners
Microelectromechanical systems
Carrier Form: xv, 230 p.: ill. ; 28 cm.
ISBN: 0819452548
Index Number: TN25
CLC: TN25-532
TN305-532
Call Number: TN25-532/M626-1/2004
Contents: Includes bibliographical references and author index.

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