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VLSI metallization /

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Bibliographic Details
Corporate Authors: Elsevier Science & Technology.
Group Author: Einspruch, Norman G. (Editor); Cohen, Simon S. (Editor); Gildenblat, Gennady Sh. (Editor)
Published: Academic Press,
Publisher Address: Orlando :
Publication Dates: 1987.
Literature type: eBook
Language: English
Series: VLSI electronics ; v. 15.
Subjects:
Integrated circuits > Very large scale integration > Design and construction.
Metallic films.
Metallizing.
TECHNOLOGY & ENGINEERING > Mechanical.
Integrated circuits > Design and construction. > Design and construction.
Electronic books.
Online Access: http://www.sciencedirect.com/science/bookseries/07367031/15
Carrier Form: 1 online resource (x, 480 pages) : illustrations.
Bibliography: Includes bibliographical references and index.
ISBN: 9781483217819
1483217817
Index Number: TK7874
CLC: TN47

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