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Laser-based micro- and nanoprocessing XI : 31 January-2 February 2017, San Francisco, California, United States /

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Bibliographic Details
Corporate Authors: Laser-Based Micro- and Nanoprocessing Conference San Francisco, California, United States; Society of Photo-optical Instrumentation Engineers
Group Author: Klotzbach, Udo; Washio, Kunihiko; Kling, Rainer
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2017]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 10092
Subjects:
Electronic packaging > Congresses
Lasers > Industrial applications > Congresses
Micromachining > Congresses
Micromechanics > Congresses
Item Description: "SPIE photonics west" -- Cover.
Carrier Form: 1 volume (various pagings) : illustrations ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510606258 (paperback) :
CLC: TN249-532
Call Number: TN249-532/L343-8/2017

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