Microelectronic materials and processes
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Corporate Authors: | |
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Group Author: | ; |
Published: |
Kluwer Academic,
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Publisher Address: | Dordrecht |
Publication Dates: | c1989. |
Literature type: | Book |
Language: | English |
Series: |
NATO ASI series. Series E, Applied sciences ; vol. 164 |
Subjects: | |
Carrier Form: | xiv, 985 p.: ill. ; 25 cm. |
ISBN: | 0792301471 |
Index Number: | TN4 |
CLC: | TN4-532 |
Contents: |
Proceedings of the NATO Advanced Study Institute on Microelectronic Materials and Processes, II Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986. Includes bibliographies. |