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Microelectronic materials and processes

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Bibliographic Details
Corporate Authors: North Atlantic Treaty organization
Group Author: (Roland Albert), 1944-; Levy Roland A.
Published: Kluwer Academic,
Publisher Address: Dordrecht
Publication Dates: c1989.
Literature type: Book
Language: English
Series: NATO ASI series. Series E, Applied sciences ; vol. 164
Subjects:
Integrated circuits > Congresses. > Congresses. > Congresses.
Microelectronics > Congresses. > Congresses.
Carrier Form: xiv, 985 p.: ill. ; 25 cm.
ISBN: 0792301471
Index Number: TN4
CLC: TN4-532
Contents: Proceedings of the NATO Advanced Study Institute on Microelectronic Materials and Processes, II Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986.
Includes bibliographies.

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