Screen Library18th European Conference on Mask Technology for Integrated Circuits and Microcomponents：proceedings : 15-16 January, 2002, Munich, Germany
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| Corporate Authors: | ; ; |
|---|---|
| Group Author: | |
| Published: |
SPIE,
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| Publisher Address: | Bellingham, Washington |
| Publication Dates: | c2002. |
| Literature type: | Book |
| Language: | English |
| Series: |
SPIE proceedings series ; v. 4764 |
| Subjects: | |
| Carrier Form: | xiii, 256 p.: ill. ; 28 cm. |
| ISBN: | 0819445312 |
| Index Number: | TN405 |
| CLC: | TN405.7-532 |
| Call Number: | TN405.7-532/E89/2002 |
| Contents: | Includes bibliographic references and author index. |