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Characterization of plasma-enhanced CVD processes：symposium held November 27-28, 1989, Boston, Massachusetts, U.S.A.

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Bibliographic Details
Group Author: Ibbotson Dale E; Hess Dennis W; Lucovsky Gerald
Published: Materials Research Society,
Publisher Address: Pittsburgh, Pa.
Publication Dates: c1990.
Literature type: Book
Language: English
Series: Materials Research Society symposium proceedings ; v. 165
Subjects:
Integrated circuits > Design and construction > Congresses
Plasma-enhanced chemical vapor deposition > Congresses
Carrier Form: ix, 250 p.: ill. ; 24 cm.
ISBN: 1558990534
Index Number: TQ026
CLC: TQ026-532
Contents: Includes bibliographical references and indexes.

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