Cover is for reference only

Proceedings of the Symposium on Patterning Science and Technology

Saved in:
Bibliographic Details
Corporate Authors: International Symposium on Patterning Science and Technology (1st 1989 Hollywood, Fla.); Electrochemical Society. Luminescence and Display Materials Group.; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. Electronics Division.
Group Author: White L. K.; Gleason Robert.; Hefferon George J.
Published: Electrochemical Society,
Publisher Address: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Publication Dates: c1990.
Literature type: Book
Language: English
Series: Proceedings / Electrochemical Society ; v. 90-1
Subjects:
Photoresists > Congresses.
Masks (Electronics) > Congresses.
Microelectronics > Congresses.
Microlithography > Congresses.
Carrier Form: vii, 248 p.: ill. ; 23 cm.
Index Number: TS82
CLC: TS82-532
Call Number: TS82-53/S989/1989/
Contents: Spine title: Patterning science and technology.
"The First International Symposium on Patterning Science and Technology was presented at the Fall Meeting of the Electrochemical Society, October 15-20, 1989, in Hollywood, Florida"--P. iii.
Includes bibliographical references and indexes.

Related Book Recommendations