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LIGA and its applications

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Bibliographic Details
Group Author: Saile Volker
Published: Wiley-VCH John Wiley, distributor],
Publisher Address: Weinheim [Chichester
Publication Dates: c2009.
Literature type: Book
Language: English
Series: Advanced micro & nanosystems ; 7
Subjects:
Microelectromechanical systems
Microtechnology
Carrier Form: x, 479 p.: ill. ; 25 cm.
ISBN: 9783527316984 (hbk.)
3527316981 (hbk.)
Index Number: TN4
CLC: TN4
TH-39
TN405
TN403
Call Number: TN4/L776
Contents: Includes bibliographical references and index.

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