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Sub-half-micron lithography for ULSIs

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Bibliographic Details
Group Author: Suzuki Katsumi 1950-; Matsui Shinji; Ochiai Yukinori 1955-
Published: Cambridge University Press,
Publisher Address: Cambridge New York
Publication Dates: 1999.
Literature type: Book
Language: English
Subjects:
Integrated circuits > Ultra large scale integration > Design and construction
Microlithography
Printed circuits > Design and construction
Carrier Form: xvii, 323 p.: ill. ; 26 cm.
ISBN: 0521570808
Index Number: TN470
CLC: TN470.2
TN470.57
TN405.7
Call Number: TN470.57/S941
Contents: Includes bibliographical references.

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