Sub-half-micron lithography for ULSIs
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Group Author: | ; ; |
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Published: |
Cambridge University Press,
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Publisher Address: | Cambridge New York |
Publication Dates: | 1999. |
Literature type: | Book |
Language: | English |
Subjects: | |
Carrier Form: | xvii, 323 p.: ill. ; 26 cm. |
ISBN: | 0521570808 |
Index Number: | TN470 |
CLC: |
TN470.2 TN470.57 TN405.7 |
Call Number: | TN470.57/S941 |
Contents: | Includes bibliographical references. |