Plasma deposition of amorphous silicon-based materials
Saved in:
Group Author: | ; ; ; |
---|---|
Published: |
Academic Press,
|
Publisher Address: | Boston |
Publication Dates: | c1995. |
Literature type: | Book |
Language: | English |
Series: |
Plasma--materials interactions |
Subjects: | |
Carrier Form: | xi, 324 p.: ill. ; 24 cm. |
ISBN: | 012137940X (alk. paper) |
Index Number: | TN304 |
CLC: | TN304.105.5 |
Call Number: | TN304.105.5/P715/ |
Contents: | Includes bibliographical references and index. |