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Plasma deposition of amorphous silicon-based materials

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Bibliographic Details
Group Author: Bruno Giovanni.; Capezzuto Pio.; Madan A.; (Arun)
Published: Academic Press,
Publisher Address: Boston
Publication Dates: c1995.
Literature type: Book
Language: English
Series: Plasma--materials interactions
Subjects:
Amorphous semiconductors > Design and construction.
Silicon alloys.
Plasma-enhanced chemical vapor deposition.
Carrier Form: xi, 324 p.: ill. ; 24 cm.
ISBN: 012137940X (alk. paper)
Index Number: TN304
CLC: TN304.105.5
Call Number: TN304.105.5/P715/
Contents: Includes bibliographical references and index.

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