Screen LibraryNano- and microelectromechanical systems：fundamentals of nano- and microengineering
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| Main Authors: | |
|---|---|
| Published: |
CRC Press,
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| Publisher Address: | Boca Raton, Fla. |
| Publication Dates: | c2001. |
| Literature type: | Book |
| Language: | English |
| Series: |
Nano- and microscience, engineering, technology, and medicine series |
| Subjects: | |
| Carrier Form: | 338 p.: ill. ; 24 cm. |
| ISBN: | 0849309166 (alk. paper) |
| Index Number: | TM3 |
| CLC: | TM3 |
| Call Number: | TM3/L993 |
| Contents: | Includes bibliographical references and index. |