Diagnostic techniques for semiconductor materials processing II:symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
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Group Author: | |
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Published: |
Materials Research Society,
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Publisher Address: | Pittsburgh, Pa. |
Publication Dates: | c1996. |
Literature type: | Book |
Language: | English |
Series: |
Materials Research Society symposium proceedings ; v. 406 |
Subjects: | |
Carrier Form: | xv, 585 p.: ill. ; 24 cm. |
ISBN: | 1558993096 (alk. paper) |
Index Number: | TN304 |
CLC: | TN304.07-532 |
Call Number: | TN304.07-532/D536/1995/ |
Contents: | Includes bibliographical references and index. |