Diagnostic techniques for semiconductor materials processing II:symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.

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Bibliographic Details
Group Author: Pang Stella W
Published: Materials Research Society,
Publisher Address: Pittsburgh, Pa.
Publication Dates: c1996.
Literature type: Book
Language: English
Series: Materials Research Society symposium proceedings ; v. 406
Subjects:
Carrier Form: xv, 585 p.: ill. ; 24 cm.
ISBN: 1558993096 (alk. paper)
Index Number: TN304
CLC: TN304.07-532
Call Number: TN304.07-532/D536/1995/
Contents: Includes bibliographical references and index.