ULSI science and technology/1987:proceedings of the...,

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Bibliographic Details
Corporate Authors: International Symposium on Ultra Large Scale Integration Science and Technology (1st 1987 Philadelphia, Pa
Group Author: Broydo S
Published: Electrochemical Society,
Publisher Address: Pennington, NJ.
Publication Dates: c1987.
Literature type: Book
Language: English
Series: Proceedings / The Electrochemical Society ; v. 87-11
Subjects:
Carrier Form: xi, 840 p.: ill. ; 23 cm.
Index Number: TN47
CLC: TN47-532
Call Number: TN47-53/I61.11/1987/
Contents: The Symposium was held May 11-15, 1987 in Philadelphia, Pa., and co-sponsored by the Electronics and Dielectrics & Insulation Divisions of the Electrochemical Society, Inc.