ULSI science and technology/1987:proceedings of the...,
Saved in:
Corporate Authors: | |
---|---|
Group Author: | |
Published: |
Electrochemical Society,
|
Publisher Address: | Pennington, NJ. |
Publication Dates: | c1987. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings / The Electrochemical Society ; v. 87-11 |
Subjects: | |
Carrier Form: | xi, 840 p.: ill. ; 23 cm. |
Index Number: | TN47 |
CLC: | TN47-532 |
Call Number: | TN47-53/I61.11/1987/ |
Contents: | The Symposium was held May 11-15, 1987 in Philadelphia, Pa., and co-sponsored by the Electronics and Dielectrics & Insulation Divisions of the Electrochemical Society, Inc. |