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Laser-assisted micro- and nanotechnologies 2003：29 June-3 July 2003, St. Petersburg, Russia

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Bibliographic Details
Corporate Authors: St. Petersburg Association of Scientists and Scholars.; Laser Association (Russia); D.S. Rozhdestvensky Russian Optical Society.; Society of Photo-Optical Instrumentation Engineers; Sankt-Peterburgskiĭ institut tochnoĭ mekhaniki i optiki.; Russia (Federation). Ministerstvo obrazovanii︠a︡.
Group Author: Veĭko V. P.; (Vadim Pavlovich)
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2004.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 5399
Subjects:
Manufacturing processes
Micromachining
Nanotechnology.
Electronic industries > Technological innovations.
Lasers > Industrial applications.
Carrier Form: x, 308 p.: ill. ; 25 cm.
ISBN: 0819453226
Index Number: TN249
CLC: TN249-532
TB4-532
Call Number: TN249-532/L343-2/2003
Contents: Earlier conference entitled: Laser-assisted microtechnology 2000.
Includes bibliographical references and author index.

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