Screen LibraryModeling aspects in optical metrology IV : 13-14 May 2013, Munich, Germany /
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| Corporate Authors: | ; |
|---|---|
| Group Author: | ; ; |
| Published: |
SPIE,
|
| Publisher Address: | Bellingham, Washington : |
| Publication Dates: | [2013] |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings of SPIE,
volume 8789 |
| Subjects: | |
| Carrier Form: | 1 volume (various pagings) : illustrations ; 28 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: |
9780819496058 : 0819496057 |
| Index Number: | QC367 |
| CLC: |
TN4-532 O432.2-532 |
| Call Number: | O432.2-532/M689/2013 |