Vacuum technology and applications /
Saved in:
Main Authors: | |
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Corporate Authors: | |
Published: |
Butterworth-Heinemann,
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Publisher Address: | Oxford ; Boston : |
Publication Dates: | 1991. |
Literature type: | eBook |
Language: | English |
Subjects: | |
Online Access: |
http://www.sciencedirect.com/science/book/9780750611459 |
Carrier Form: | 1 online resource (vii, 319 pages) : illustrations |
Bibliography: | Includes bibliographical references and index. |
ISBN: |
9781483103334 1483103331 |
Index Number: | TJ940 |
CLC: | TB7 |
Contents: |
""Front Cover""; ""Vacuum Technology and Applications""; ""Copyright Page""; ""Table of Contents""; ""Preface""; ""Acknowledgments""; ""Chapter 1. Introduction""; ""1.1 General""; ""1.2 The gaseous state""; ""1.3 Gas flow""; ""1.4 Vacuum system characteristics""; ""References""; ""Chapter 2. Vacuum pumps (rougha ?medium range)""; ""2.1 General introduction""; ""2.2 Rotary pumps""; ""2.3 Roots vacuum pumps""; ""2.4 Dry vacuum pumps""; ""References""; ""Chapter 3. Vacuum pumps (higha ?ultra-high range) ""; ""3A 1 General introduction""; ""3.2 Gas transfer pumps""; ""3.3 Entrapment pumps"" ""7.2 Vacuum technology in the semiconductor industry""""7.3 Vacuum technology in metallurgical processes""; ""7.4 Vacuum technology in the chemical industry""; ""References""; ""Chapter 8. Appendix: units, conversion factors and other data""; ""8.1 Units of pressure""; ""8.2 Amount of substance""; ""8.3 PNEUROP specifications for the characterization of vacuum pumps""; ""Index"" |