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Advances in metrology for X-ray and EUV optics IX : 24 August - 4 September 2020, Online Only, United States /

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Bibliographic Details
Corporate Authors: Advances in Metrology for X-Ray and EUV Optics Conference‏ Online Only, United States; SPIE Society
Group Author: Assoufid, Lahsen; Ohashi, Haruhiko; Asundi, Anand
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2020]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 11492
Subjects:
Optical measurements > Congresses
Optical instruments > Design and construction > Congresses
Measuring instruments > Design and construction > Congresses
Laser interferometers > Congresses
Measurement > Congresses
Item Description: "At SPIE optics engineering + applications"--Cover.
Carrier Form: 1 volume (various pagings) : illustrations, forms ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510637900 (paperback) :
CLC: O439-532
TB96-532
Call Number: TB96-532/A244-1/2020

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